Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation
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DOI: 10.3390/mi13020217
Abstract: Micro-electro-mechanical system (MEMS) vapor cells are key components for sensors such as chip-scale atomic clocks (CSACs) and magnetometers (CSAMs). Many approaches have been proposed to fabricate MEMS vapor cells. In this article, we propose a… read more here.
Keywords: filling mems; mems vapor; wafer level; chemical reaction ... See more keywords