Ultrathin single‐crystalline LiNbO 3 film bulk acoustic resonator for 5G communication
Sign Up to like & getrecommendations! Published in 2020 at "Electronics Letters"
DOI: 10.1049/el.2020.1922
Abstract: This Letter reports a high-performance film bulk acoustic resonator (FBAR) that can be applied in 5G wireless communication. The FBAR has a back-etched free-standing structure using an ultra-thin single-crystalline lithium niobate (LiNbO3) as the piezoelectric… read more here.
Keywords: bulk; single crystalline; bulk acoustic; film ... See more keywords
The Main Lateral Mode Approximation of a Film Bulk Acoustic Resonator With Perfect Metal Electrodes
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2018.2846559
Abstract: Using first principles and the constitutive equations of a piezoelectric crystal, we solve the 2-D problem inside a three-layer film bulk acoustic resonator (FBAR) in order to study the dispersion and parasitic lateral modes’ characteristic… read more here.
Keywords: mode; acoustic resonator; lateral mode; bulk acoustic ... See more keywords
Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2022.3144392
Abstract: Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance… read more here.
Keywords: film bulk; resonant magnetometer; film; detection ... See more keywords
Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13010102
Abstract: As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling coefficient (Keff2),… read more here.
Keywords: fbar; influence; keff2; bulk acoustic ... See more keywords
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14010157
Abstract: The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance. The Keff2 of the… read more here.
Keywords: based adjustable; bulk acoustic; film bulk; resonator ... See more keywords