Electric signals measured during plasma thin-film etching and their connection to the electron concentration and the properties of the treated surface
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DOI: 10.1088/1361-6595/ac4e23
Abstract: The electric characteristics of a discharge are usually changed when a thin film is deposited on or etched from a discharge electrode or a substrate. The electric characteristics include the plasma potential, discharge voltage and… read more here.
Keywords: film etching; electron concentration; discharge; film ... See more keywords