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Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2854636
Abstract: Parylene C is a thin-film polymer used as a biocompatible barrier layer in biomedical implants and implantable MEMS; free-film Parylene C may serve as both the substrate and insulation in polymer-based microdevices, a growing branch…
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Keywords:
adhesion;
thin film;
film parylene;
parylene ... See more keywords