A Thin-Film Piezoelectric-on-Silicon MEMS Oscillator for Mass Sensing Applications
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2020.2979283
Abstract: In this study, a Thin-film Piezoelectric-on-Silicon (TPoS) MEMS oscillator is successfully demonstrated that uses lead zirconate titanate (PZT) thin-film piezoelectric layer deposited on a single-crystal silicon substrate to realize a length-extensional mode resonator, having a… read more here.
Keywords: thin film; film piezoelectric; piezoelectric silicon; mass ... See more keywords
A Harvesting Circuit for Flexible Thin-Film Piezoelectric Generator Achieving 562% Energy Extraction Improvement With Load Screening
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2020.3044782
Abstract: In this article, a novel energy harvesting (EH) interface for a flexible thin-film piezoelectric generator (FPEG) is proposed for EH from irregular human motion. The traditional thick piezoelectric generator (PEG) based kinetic EH circuits are… read more here.
Keywords: piezoelectric generator; energy; thin film; flexible thin ... See more keywords