Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements
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DOI: 10.3390/mi12060632
Abstract: In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level… read more here.
Keywords: film resist; impedance measurements; electrical impedance; impedance ... See more keywords