Tantalum Oxynitride Thin Films: Assessment of the Photocatalytic Efficiency and Antimicrobial Capacity
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DOI: 10.3390/nano9030476
Abstract: Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed proportion reactive gas mixture (85% N2 + 15% O2). To produce the films, the partial pressure of the mixture in the… read more here.
Keywords: thin films; capacity; films assessment; tantalum oxynitride ... See more keywords