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Published in 2017 at "IEEE Transactions on Applied Superconductivity"
DOI: 10.1109/tasc.2017.2669583
Abstract: Niobium and niobium nitride thin films are transitioning from fundamental research toward wafer scale manufacturing with technology drivers that include superconducting circuits and electronics, optical single photon detectors, logic, and memory. Successful microfabrication requires precise…
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Keywords:
superconducting nbn;
oxidation;
degradation superconducting;
films atmospheric ... See more keywords