Utilization of As50Se50 thin films in electron beam lithography
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DOI: 10.1016/j.matchemphys.2020.124052
Abstract: Abstract Chalcogenide glass of As50Se50 composition have been intensively studied for its interesting physical and chemical properties. Presented manuscript explores the applicability of As50Se50 thermally evaporated thin films in electron beam lithography exploiting wet etching… read more here.
Keywords: thin films; beam lithography; films electron; electron beam ... See more keywords