Thermodynamic modeling of the deposition of Si—C—N films from the gas phase during the decomposition of organosilicon compounds
Sign Up to like & getrecommendations! Published in 2018 at "Russian Chemical Bulletin"
DOI: 10.1007/s11172-018-2167-7
Abstract: Thermodynamic modeling of the process of chemical vapor deposition (CVD) of SiCx and SiCxNy films from the gas phase was carried out using organosilicon compounds (EtN(SiMe3)2, PhN(SiMe3)2, and PhSiMe3) at reactor pressures of 0.01 and… read more here.
Keywords: phase; deposition; films gas; thermodynamic modeling ... See more keywords
Ni: Fe 2 O 3 , Mg: Fe 2 O 3 and Fe 2 O 3 thin films gas sensor application
Sign Up to like & getrecommendations! Published in 2018 at "Physica B: Condensed Matter"
DOI: 10.1016/j.physb.2018.04.028
Abstract: Abstract Iron oxide is a widely used sensitive material for gas sensor applications. They have fascinated much attention in the field of gas sensing and detecting under atmospheric conditions and at 200 °C temperature due to… read more here.
Keywords: thin films; sensor application; gas sensor; gas ... See more keywords