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Published in 2018 at "Micromachines"
DOI: 10.3390/mi9080389
Abstract: Crystalline TiO2 films were prepared on unheated glass substrates by radio frequency (RF) reactive magnetron sputtering at normal angle of incidence (a = 0°) and at glancing angle (a = 87°). The effect of the…
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Keywords:
films glancing;
glancing angle;
effect;
structure ... See more keywords