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Published in 2018 at "Physics of the Solid State"
DOI: 10.1134/s1063783418100098
Abstract: The dependence of the conductivity of the films of hafnium oxide HfO2 synthesized in different modes is studied. Depending on the modes of synthesis, the conductivity of HfO2 at a fixed electric field of 1.0…
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Keywords:
hafnium oxide;
cathodoluminescence;
films hafnium;
oxygen vacancies ... See more keywords