Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films
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DOI: 10.1016/j.tsf.2020.137819
Abstract: Abstract Sputter deposited AlScN films with an Sc content of 38 at. % were investigated by X-ray diffraction and electron microscopy to study the influence of the radio frequency (RF) bias on the growth of… read more here.
Keywords: microscopy; negative bias; piezoelectric properties; oriented grains ... See more keywords