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Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2016.10.180
Abstract: Abstract Boron carbon nitride (BCN) thin films are investigated for their optical properties. BCN, is the unanimous choice for inter-dielectric layer (IDL) in very large scale integration (VLSI) because of its low-k dielectric constant. Optical…
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Keywords:
thin films;
xps studies;
films sputtering;
bcn thin ... See more keywords