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Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.06.001
Abstract: Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film…
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Keywords:
films titanium;
processing structure;
properties reactively;
sputtered films ... See more keywords
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Published in 2017 at "Russian Journal of Applied Chemistry"
DOI: 10.1134/s1070427217070096
Abstract: TiO2, Cr2O3, ZrO2, and SnO2 films with thicknesses of ∼10–100 nm were produced via dipping into solution and subsequent annealing in air. The films were studied by the methods of scanning electron microscopy, elemental X-ray…
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Keywords:
thin films;
chemical solution;
solution deposited;
films titanium ... See more keywords