A breakthrough in contact engineering for sub-3 nm FinFETs: overcoming the fin-pitch bottleneck.
Sign Up to like & getrecommendations! Published in 2025 at "Nanotechnology"
DOI: 10.1088/1361-6528/ae2513
Abstract: We report a breakthrough in contact engineering that overcomes the long-standing fin-pitch (FP) bottleneck, enabling FinFET scaling to sub-3 nm nodes, including feasibility at the 10 Å node. We propose an I-shaped source/drain (S/D) architecture… read more here.
Keywords: contact engineering; pitch; fin pitch; contact ... See more keywords
Filmwise Condensation of Steam on Pin Fin Arrays Fabricated by Selective Laser Melting
Sign Up to like & getrecommendations! Published in 2019 at "Defect and Diffusion Forum"
DOI: 10.4028/www.scientific.net/ddf.390.71
Abstract: In this study, nine vertical flat plates of pin fin arrays were fabricated by selective laser melting to investigate the possible enhancements of external condensation. These specimens are cylindrical pin fins of the same fin… read more here.
Keywords: fin pitch; pin fin; fin; condensation ... See more keywords