Coarse-to-fine optical MEMS accelerometer design and simulation.
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DOI: 10.1364/ao.439762
Abstract: A coarse-to-fine optical microelectromechanical systems (MEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof… read more here.
Keywords: sensitivity; optical mems; fine optical; simulation ... See more keywords