Theoretical study of the laser annealing process in FinFET structures
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DOI: 10.1016/j.apsusc.2018.10.155
Abstract: Abstract In this paper we present a computational tool for the simulation of laser annealing processes in FinFET structures. This is a complex self-consistent problem, where heating is evaluated by means of the time harmonic… read more here.
Keywords: theoretical study; process; study laser; finfet structures ... See more keywords
Quantification of local strain distributions in nanoscale strained SiGe FinFET structures
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Applied Physics"
DOI: 10.1063/1.4991472
Abstract: Strain within nanoscale strained SiGe FinFET structures has been investigated using a combination of X-ray diffraction and transmission electron microscopy-based nanobeam diffraction (NBD) techniques to reveal the evolution of the stress state within the FinFETs.… read more here.
Keywords: nanoscale strained; sige finfet; finfet structures; stress ... See more keywords