Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices
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DOI: 10.1016/j.mee.2017.11.015
Abstract: Abstract This paper reports effects of the constraint condition at fixed end of the Ti/Au-layered micro-cantilever on the structure stability. Two types of constraint at the fixed end were used. One was constraining only bottom… read more here.
Keywords: micro cantilever; end; structure stability; fixed end ... See more keywords