Inertia alignment of phase-shifting algorithms for high-numerical-aperture spherical testing in Fizeau interferometry.
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DOI: 10.1364/ao.465761
Abstract: In Fizeau interferometry for high-numerical-aperture spherical surface tests, the mechanical phase shift becomes spatially nonuniform within the observation aperture. We divided the aperture into annular regions and calculated the object phase using several algorithms designed… read more here.
Keywords: aperture spherical; high numerical; aperture; numerical aperture ... See more keywords