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Published in 2018 at "Applied Physics Express"
DOI: 10.7567/1882-0786/aaf5c2
Abstract: A 1.5 μm AlN epilayer with a root-mean-square surface roughness of 0.25 nm was grown by metal-organic chemical vapor deposition at the single substrate temperature below 1200 °C. The ultra-flat surface is achieved with 30…
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Keywords:
grown pulsed;
aln grown;
ultra flat;
aln ... See more keywords