Pixel-based absolute surface metrology by three flat test with shifted and rotated maps
Sign Up to like & getrecommendations! Published in 2018 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2017.10.021
Abstract: Abstract In traditional three flat test, it only provides the absolute profile along one surface diameter. In this paper, an absolute testing algorithm based on shift-rotation with three flat test has been proposed to reconstruct… read more here.
Keywords: flat test; pixel based; surface; three flat ... See more keywords
Absolute flat test using rotated and multi-shifted maps with relative tilt measurement
Sign Up to like & getrecommendations! Published in 2019 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2018.10.020
Abstract: Abstract In classical three-flat test, error in reference surface can not be identified fully. What we obtain is only the absolute radial profile instead. In addition, at least three flats with similarly high accuracy are… read more here.
Keywords: using rotated; test; test using; flat test ... See more keywords