Piezoelectric ultra-sensitive aluminum nitride thin film on flexible aluminum substrate
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DOI: 10.1007/s10853-017-1566-8
Abstract: AbstractDevelopment of ultra-sensitive mechanical pressure sensors is required for various technological fields such as medical diagnosis and gas leakage. Aluminum nitride (AlN) thin films deposited by rf reactive sputtering on flexible aluminum substrates show a… read more here.
Keywords: aluminum nitride; flexible aluminum; aln; film ... See more keywords