Piezoelectricity and biocompatibility of flexible ScxAl(1-x)N thin films for compliant MEMS transducers.
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DOI: 10.1021/acsami.0c00552
Abstract: There is huge research activity in the development of flexible and biocompatible piezoelectric materials for next generation compliant Micro Electro-Mechanical Systems (MEMS) transducers to be exploited in wearable devices and implants. This work reports for… read more here.
Keywords: mems transducers; biocompatibility flexible; flexible scxal; piezoelectricity biocompatibility ... See more keywords