Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide
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DOI: 10.1109/tie.2021.3126981
Abstract: Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because… read more here.
Keywords: flexure guide; nanopositioning stage; long stroke; stage ... See more keywords