A flexure motion stage system for light beam control
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4168-8
Abstract: This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical… read more here.
Keywords: flexure motion; motion stage; light beam; motion ... See more keywords