Design of a kinematic flexure mount for precision instruments based on stiffness characteristics of flexural pivot
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DOI: 10.1016/j.mechmachtheory.2020.103868
Abstract: Abstract Precision components in optical instruments enjoy the benefits of kinematic flexure mount, owing to its excellent performance evident in space telescope and lithography equipment. The stiffness behavior of a flexure mount is important for… read more here.
Keywords: mount; flexure mount; kinematic flexure; precision ... See more keywords