Experimental investigation of actuation in a micromachined electrically floating tunable capacitor
Sign Up to like & getrecommendations! Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.02.007
Abstract: Abstract In this paper, a tunable parallel plate capacitor with an electrically floating plate has been designed, micromachined and characterized. The device is fabricated from a single metal layer based on a low-cost standard process.… read more here.
Keywords: floating tunable; capacitor; electrically floating; experimental investigation ... See more keywords