Stoichiometry Dependence of Physical and Electrochemical Properties of the SnOx Film Anodes Deposited by Pulse DC Magnetron Sputtering
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DOI: 10.3390/ma14071803
Abstract: A batch of Sn oxides was fabricated by pulse direct current reactive magnetron sputtering (pDC−RMS) using different Ar/O2 flow ratios at 0.3 Pa; the influence of stoichiometry on the physical and electrochemical properties of the… read more here.
Keywords: magnetron sputtering; electrochemical properties; film; flow ratios ... See more keywords