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Published in 2018 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.11.019
Abstract: Abstract This research exhibits the development of a thinner and mechanically stable anodic aluminum oxide (AAO) membrane system by providing Al supporting mesh known as Al textured AAO (AT-AAO) membrane. Accordingly AAO was fabricated on…
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Keywords:
fluid permeation;
mechanically stable;
membrane;
aao membrane ... See more keywords