Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems
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DOI: 10.3788/col201816.032201
Abstract: Calcium fluoride is widely used in optical lithography lenses and causes retardation that cannot be ignored. However, few studies have been conducted to compensate for the retardation caused by calcium fluoride in optical lithography systems.… read more here.
Keywords: calcium fluoride; optical lithography; calcium; caused calcium ... See more keywords