Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret
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DOI: 10.1038/s41598-021-03540-0
Abstract: The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF3) plasma. Microwave characterization (0–50… read more here.
Keywords: fluoropolymer; film; fluoropolymer electret; film fluoropolymer ... See more keywords