Focused electron beam induced deposition meets materials science
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.10.012
Abstract: Abstract Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam lithography but is in addition capable of creating complex three-dimensional… read more here.
Keywords: induced deposition; beam induced; materials science; electron beam ... See more keywords
Fluctuations of focused electron beam in a conventional SEM.
Sign Up to like & getrecommendations! Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2019.05.008
Abstract: Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained… read more here.
Keywords: fluctuations focused; noise; electron beam; focused electron ... See more keywords
Cell stimulation by focused electron beam of atmospheric SEM.
Sign Up to like & getrecommendations! Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2019.112823
Abstract: Cell stimulation has been performed with a focused electron beam. To protect the live cells from the vacuum environment of the electron beam, the beam irradiated the ambient cells via a thin film. In this… read more here.
Keywords: electron beam; cell stimulation; focused electron; beam ... See more keywords
Ablation and Microstructure Imaging of Dentin-Enamel Junction Using Focused Electron Beam in an Environmental Scanning Electron Microscope
Sign Up to like & getrecommendations! Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618005597
Abstract: Focused electron beam or electron probe in an environmental scanning electron microscope (ESEM) is used to ablate and image a thin layer of mixed organic and inorganic interface between the human tooth’s dentin and enamel… read more here.
Keywords: dentin enamel; environmental scanning; scanning electron; electron ... See more keywords
Focused Electron Beam Induced Deposition (FEBID) and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br.
Sign Up to like & getrecommendations! Published in 2019 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.9b07634
Abstract: Focused electron beam induced deposition using the heteroleptic complex (η3-C3H5)Ru(CO)3Br as a precursor resulted in deposition of material with Ru content of 23 at%. TEM images indicated a nanogranular structure of pure Ru nanocrystals, embedded… read more here.
Keywords: deposition; electron beam; focused electron; c3h5 3br ... See more keywords
Superconducting single-photon detectors fabricated via a focused electron beam-induced deposition process
Sign Up to like & getrecommendations! Published in 2023 at "AIP Advances"
DOI: 10.1063/5.0080674
Abstract: Superconducting detectors have become essential devices for high-performance single-photon counting over a wide wavelength range with excellent time resolution. Detector fabrication typically relies on resist-based lithography processes, which can limit possibilities for device integration, e.g.,… read more here.
Keywords: photon detectors; beam induced; single photon; electron beam ... See more keywords
Nanowire Magnetic Force Sensors Fabricated by Focused-Electron-Beam-Induced Deposition
Sign Up to like & getrecommendations! Published in 2020 at "Physical Review Applied"
DOI: 10.1103/physrevapplied.13.044043
Abstract: We demonstrate the use of individual magnetic nanowires (NWs), grown by focused electron beam induced deposition (FEBID), as scanning magnetic force sensors. Measurements of their mechanical susceptibility, thermal motion, and magnetic response show that the… read more here.
Keywords: focused electron; beam induced; force sensors; electron beam ... See more keywords
High-speed vacuum evaporation of large-area targets by a focused electron beam
Sign Up to like & getrecommendations! Published in 2017 at "Instruments and Experimental Techniques"
DOI: 10.1134/s0020441217030149
Abstract: A method of electron-beam evaporation of a target in a vacuum of ~10–2 Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an… read more here.
Keywords: evaporation; target; electron; electron beam ... See more keywords
Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi11010048
Abstract: Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with… read more here.
Keywords: probe; scanning probe; microscopy; electron beam ... See more keywords
Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material
Sign Up to like & getrecommendations! Published in 2020 at "Micromachines"
DOI: 10.3390/mi12010008
Abstract: High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the… read more here.
Keywords: interconnecting material; beam induced; material; dense lines ... See more keywords
Formation of Diamane Nanostructures in Bilayer Graphene on Langasite under Irradiation with a Focused Electron Beam
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12244408
Abstract: In the presented paper, we studied bilayer CVD graphene transferred to a langasite substrate and irradiated with a focused electron beam through a layer of polymethyl methacrylate (PMMA). Changes in the Raman spectra and an… read more here.
Keywords: diamane; bilayer graphene; electron beam; focused electron ... See more keywords