Focused Soft X-Ray Beam Induced Deposition: Recent Advances to a Novel Approach for Fabrication of Metallic Nanostructures
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DOI: 10.1017/s1431927618012965
Abstract: 1. Physical Chemistry II, Friedrich-Alexander-Univers ität Erlangen-Nürnberg, Erlangen, Germany. 2. present address: Carl Zeiss Semiconductor Manufact uring Technology, Roßdorf, Germany. 3. Elettra-Sincrotrone Trieste, Area Science Park, Tr ieste, Italy. 4. Swiss Light Source, Paul Scherrer… read more here.
Keywords: deposition recent; induced deposition; beam induced; focused soft ... See more keywords