A simplified focusing and astigmatism correction method for a scanning electron microscope
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DOI: 10.1063/1.5009683
Abstract: Defocus and astigmatism can lead to blurred images and poor resolution. This paper presents a simplified method for focusing and astigmatism correction of a scanning electron microscope (SEM). The method consists of two steps. In… read more here.
Keywords: method; focusing astigmatism; astigmatism correction; electron microscope ... See more keywords