Vibrations of a Resonant Gas Sensor Under Multicoupled Fields
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Computational and Nonlinear Dynamics"
DOI: 10.1115/1.4042292
Abstract: In this paper, a dynamics model of a microresonant gas sensor under multifields forces is proposed in which molecular force nonlinearity, gas damping force nonlinearity, and electric field force nonlinearity are considered. The coupled free… read more here.
Keywords: microresonant gas; force nonlinearity; gas sensor; gas ... See more keywords
Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14010211
Abstract: Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability.… read more here.
Keywords: sensitivity; nonlinearity; micro gyroscope; force nonlinearity ... See more keywords