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Published in 2020 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2020.113619
Abstract: Abstract Micro-electromechanical systems (MEMS) gyroscope is fragile under mechanical impact. Especially, MEMS tuning fork gyroscope with movable structures, such as oscillating frames and folding beams, is susceptible to failure during the gun launch. However, the…
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Keywords:
gyroscope;
fork gyroscope;
analysis;
gun launch ... See more keywords