Analytical Modeling and Experimental Verification of Nonlinear Mode Coupling in a Decoupled Tuning Fork Microresonator
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DOI: 10.1109/jmems.2018.2830770
Abstract: This paper provides the analytical and experimental studies into the nonlinear mode coupling in a tuning fork microresonator, with electrostatic actuation at forced and internal resonance frequencies. The analytical investigation leads to modal equations that… read more here.
Keywords: mode coupling; nonlinear mode; fork microresonator; tuning fork ... See more keywords