Optical form measurement employing a tiltable line scanning, low coherence interferometer for annular subaperture stitching interferometry
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DOI: 10.1088/1361-6501/abfe83
Abstract: This contribution presents experimental and simulation results of a tiltable line scanning low coherence interferometer applied for form measurement of spherical and aspherical objects with a diameter of up to 300 mm. The region of… read more here.
Keywords: form measurement; coherence interferometer; line scanning; tiltable line ... See more keywords