Formation of Au Nanoparticles and Features of Etching of a Si Substrate under Irradiation with Atomic and Molecular Ions
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DOI: 10.1134/s106378262001025x
Abstract: Abstract The formation of nanoparticles under the irradiation of a thin metallic gold film by accelerated atomic and molecular ions is demonstrated. The obtained structures are used to form porous silicon by the metal-assisted chemical… read more here.
Keywords: irradiation; molecular ions; nanoparticles features; porous silicon ... See more keywords