Formation of neodymium oxide by thermal oxidation of sputtered Nd thin film on Si substrate
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DOI: 10.1007/s10854-017-7009-0
Abstract: This paper aims to report on the formation of neodymium oxide by thermal oxidation of sputtered metallic Nd thin film deposited on Si substrate. Sputtered Nd thin film on Si substrate followed by thermal oxidation… read more here.
Keywords: formation neodymium; thin film; film; thermal oxidation ... See more keywords