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Published in 2019 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ab0954
Abstract: The influence of metastable atoms on formation of the nonlocal electron distribution function (EDF) and other characteristics of gas-discharge plasma in argon is investigated in this paper. Superelastic collisions of electrons with metastable atoms strongly…
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Keywords:
atoms formation;
edf;
influence metastable;
formation nonlocal ... See more keywords