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Published in 2023 at "Technical Physics Letters"
DOI: 10.21883/tpl.2023.02.55361.19409
Abstract: The investigations of Pd/Ge/Au contact system forming regimes influence on the specific contact resistivity to n-type conductivity GaAs layer were carried out. The method of samples surface treatment before the layers evaporation and thermal annealing…
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Keywords:
system;
regimes contact;
influence;
contact system ... See more keywords