Coherent Fourier scatterometry using orbital angular momentum beams for defect detection.
Sign Up to like & getrecommendations! Published in 2021 at "Optics express"
DOI: 10.1364/oe.414584
Abstract: Defect inspection on lithographic substrates, masks, reticles, and wafers is an important quality assurance process in semiconductor manufacturing. Coherent Fourier scatterometry (CFS) using laser beams with a Gaussian spatial profile is the standard workhorse routinely… read more here.
Keywords: coherent fourier; scatterometry; angular momentum; fourier scatterometry ... See more keywords
Coherent Fourier scatterometry nanoparticle detection enhanced by synthetic optical holography.
Sign Up to like & getrecommendations! Published in 2022 at "Optics letters"
DOI: 10.1364/ol.463807
Abstract: We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates… read more here.
Keywords: nanoparticle detection; fourier scatterometry; synthetic optical; detection ... See more keywords