Stealth dicing of 1-mm-thick glass with aberration-free axial multi-focus beams.
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DOI: 10.1364/ol.460947
Abstract: Laser stealth dicing can realize material separation with negligible surface damage, but severe aberrations in thick materials degrade processing quality. This Letter presents a nonlinear point-to-point transformation method combined with spherical aberration compensation to achieve… read more here.
Keywords: aberration; stealth dicing; aberration free; free axial ... See more keywords