Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology
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DOI: 10.3390/mi11060561
Abstract: Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for… read more here.
Keywords: free hanging; microfluidic channels; channel technology; surface channel ... See more keywords