Crosstalk decoupling measurement method to determine the six degrees of freedom of motion error of linear stages.
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DOI: 10.1364/ao.448912
Abstract: The simultaneous measurement of all six degrees of freedom of motion error for a linear stage is significantly faster than methods that measure each degree of freedom separately. However, in current simultaneous measurement methods, error… read more here.
Keywords: measurement; degrees freedom; motion error; freedom motion ... See more keywords