Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes.
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DOI: 10.1088/1361-6528/aaabce
Abstract: We report a simple and scalable technique for the fabrication of nanopore arrays on freestanding SiN and graphene membranes based on electron-beam lithography and reactive ion etching. By controlling the dose of the single-shot electron-beam… read more here.
Keywords: sin graphene; lithography; nanopore arrays; freestanding sin ... See more keywords