A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation
Sign Up to like & getrecommendations! Published in 2018 at "AIP Advances"
DOI: 10.1063/1.5022654
Abstract: The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model… read more here.
Keywords: single frequency; frequency capacitively; coupled plasma; capacitively coupled ... See more keywords
Self-consistent simulation of the impedance matching network for single frequency capacitively coupled plasma
Sign Up to like & getrecommendations! Published in 2022 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/ac49b6
Abstract: Matching networks are of vital importance for capacitively coupled plasmas (CCPs) to maximize the power transferred to the plasma discharge. The nonlinear interaction between the external circuit and plasma has to be considered to design… read more here.
Keywords: capacitively coupled; matching network; single frequency; self consistent ... See more keywords