Organic analytes sensitivity in meso-porous silicon electrical sensor with front side and backside contacts
Sign Up to like & getrecommendations! Published in 2017 at "Arabian Journal of Chemistry"
DOI: 10.1016/j.arabjc.2017.05.015
Abstract: Abstract Chemical sensors fabricated from porous silicon (PSi) for liquid organic analytes (ethanol, acetonitrile, methanol and acetone) are demonstrated, with an emphasis on the impact of the Ag electrical contact placement on sensor performance. Sensors… read more here.
Keywords: response; backside; front side; porous silicon ... See more keywords
Front-side releasing oriented clamped–clamped beams for piezoresistive sensors
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/acd126
Abstract: Front-side releasing suspended structures made using bulk micromachining processes have the advantages of simplifying vacuum or hermetic packaging processes and reducing squeeze-film damping. This paper studies the effect of doping concentration on the etching rate… read more here.
Keywords: clamped beams; front side; clamped clamped; 110 oriented ... See more keywords